Auflistung nach Schlagwort "Electron bombardment"

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  • Roughness and stability of silicon on insulator surfaces 
    Czubanowski, M.; Tegenkamp, Christoph; Ernst, W.; Pfnür, Herbert (College Park, MD : American Institute of Physics, 2004)
    The feasibility of low temperature processes (below 800°C), to obtain atomically clean and smooth surfaces on (100) oriented silicon on insulator material (SOI) with negligible variation of the top Si film thickness was ...